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Daria Riabinina

PHD Student

Université du Québec
Institut national de la recherche scientifique
Énergie, Matériaux et Télécommunications
1650, boulevard Lionel-Boulet
Varennes, Québec, Canada
J3X 1S2

Telephone: +1 (450) 929-8251
Fax: +1 (450) 929-8102
riabinina@emt.inrs.ca
www.emt.inrs.ca

 
Pulsed laser deposition of Ge on Si surfaces

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The heteroepitaxial growth of Ge on Si is known to result in the self-assembly of three dimensional nano-islands, which may trap charge carriers in atomic-like potentials, to be exploited for diverse applications. Nevertheless, the deposition of Ge on Si surfaces by traditional techniques generally leads to rather poor optoelectronic properties of statistical ensembles of the grown islands. Pulsed laser deposition (PLD) represents an emerging tool, which allows for varying with unique flexibility the kinetic parameters of the growth process. By ablating the surface of a Ge target with short and intense laser pulses, a Ge plasma plume is generated, which may contain high-energy Ge atoms and clusters. This, in turn, allows for maintaining a low thermal balance at the Si substrate surface, the excess kinetic energy of the deposited Ge atoms being sufficient to assure the self-assembly of the nano-islands. The project consists in exploring this new range of possible growth conditions, with the aim of improving the optoelectronic features of Ge on Si surfaces.

Atomic force microscopy image of a Ge nanostructured film deposited by PLD on a Si(001) surface covered by the native Si oxide. Image dimensions: 1 µm X 1 µm.